企業PR

Beijing YHXC Photonics Technology Co.,LTD was officially established in Huairou Science City in November 2023. As a National High-Tech Enterprise, it is a "hard-tech" company focused on serving the laser source needs for front-end inspection in advanced semiconductor chip manufacturing processes. The company is dedicated to solving "bottleneck" issues in key technologies, breaking foreign technological embargoes, and achieving domestic substitution. With solid-state laser technology at its core, the company has launched over ten laser products across four series—continuous wave (CW), nanosecond (ns), picosecond (ps), and femtosecond (fs)—for applications in semiconductor metrology, inspection, and annealing. Wavelength coverage spans from 1064nm to 193nm. These products have been successfully delivered in volume to leading industry customers and have gained market recognition.
1. Development History and Strategic Positioning
Rooted in Beijing's Huairou Science City, the company has developed rapidly by leveraging the influence of national major science infrastructure and supportive policies in Huairou for domestic instrument development. Its products have rapidly iterated from 1064nm to 193nm, solving critical challenges for leading domestic semiconductor companies. Over three years, it achieved sales of 700,000 RMB, 10.24 million RMB, and 68.68 million RMB, and completed seven financing rounds totaling 184.5 million RMB. Recognition from customers and support from institutions have fueled our full commitment to new product development and iterative upgrades, safeguarding the development of China's semiconductor industry.
2. Core Products and Market Breakthroughs
Centered on all-solid-state laser technology, the company's product line covers four series: CW, nanosecond, picosecond, and femtosecond, with wavelengths extending into the deep ultraviolet (DUV) band. It focuses on two core application scenarios: wafer defect inspection and IGBT laser annealing. The Megrez-DUV series and Merak-VUV series (266nm/193nm) lasers are used for wafer defect inspection, having achieved domestic substitution for internationally embargoed products and securing multiple repeat orders from leading manufacturers. The Dubhe-GDH series (527nm/351nm) high-power lasers are used for IGBT wafer annealing, with multiple batches shipped, making them a primary light source for annealing equipment. Notably, the 193nm laser for photomask (reticle) inspection has entered mass production. This will be China's first deep ultraviolet, high-repetition-rate, high-power laser for advanced-node mask inspection.
3. Development in Beijing and Team Strength
The company is deeply integrated into the construction of Beijing's International Science and Technology Innovation Center. It operates from a 1,260-square-meter facility in Huairou (including 600 sqm of Class 1,000 and 200 sqm of Class 100 cleanrooms) and has received support from Beijing municipal R&D projects. Founder Li Kai brings 21 years of experience in the optics field and has led multiple national-level projects. The core team consists of senior multidisciplinary experts with comprehensive technical R&D and project management capabilities. The team has completed 8 invention patents, 2 software copyrights, and 6 certifications, and actively participates in standard establishment. It has taken the lead in drafting and formulating the following standards: General High-Tech Requirements for High-Power Solid-State Lasers(2025), Technical Requirements for All-Solid-State Deep Ultraviolet Lasers(2025), Requirements for Laser Metal Cleaning(2025), Safety Use and Protection Requirements for Deep Ultraviolet Lasers(2026), and Test Methods for Main Performance Parameters of Deep Ultraviolet All-Solid-State Lasers(2026).